ETCHANTETCH RATE RATIOETCH RATE (绝对优势 (+) 劣势 (-) ( ) / (111) (110) / (111) ( ) SI3N4SIO2KOH (44%, 85 ℃) 3006O01.4 & MU; M / MIN 选择性制服/%）Si3N4SiO2SISi3
